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Recent Progress in Plasmonic Colour Filters for Image Sensor and Multispectral Applications

机译:用于图像传感器和多光谱应用的等离子体彩色滤光片的最新进展

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摘要

Using nanostructured thin metal films as colour filters offers several important advantages, in particular high tunability across the entire visible spectrum and some of the infrared region, and also compatibility with conventional CMOS processes. Since 2003, the field of plasmonic colour filters has evolved rapidly and several different designs and materials, or combination of materials, have been proposed and studied. In this paper we present a simulation study for a single- step lithographically patterned multilayer structure able to provide competitive transmission efficiencies above 40% and contemporary FWHM of the order of 30 nm across the visible spectrum. The total thickness of the proposed filters is less than 200 nm and is constant for every wavelength, unlike e.g. resonant cavity-based filters such as Fabry-Perot that require a variable stack of several layers according to the working frequency, and their passband characteristics are entirely controlled by changing the lithographic pattern. It will also be shown that a key to obtaining narrow-band optical response lies in the dielectric environment of a nanostructure and that it is not necessary to have a symmetric structure to ensure good coupling between the SPPs at the top and bottom interfaces. Moreover, an analytical method to evaluate the periodicity, given a specific structure and a desirable working wavelength, will be proposed and its accuracy demonstrated. This method conveniently eliminate the need to optimize the design of a filter numerically, i.e. by running several time-consuming simulations with different periodicities. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
机译:使用纳米结构的金属薄膜作为彩色滤光片具有几个重要的优点,特别是在整个可见光谱和某些红外区域具有很高的可调谐性,以及与常规CMOS工艺的兼容性。自2003年以来,等离子彩色滤光片领域发展迅速,已经提出并研究了几种不同的设计和材料或材料组合。在本文中,我们对单步光刻图案化的多层结构进行了仿真研究,该结构能够提供超过40%的竞争传输效率以及在可见光谱范围内具有约30 nm的现代FWHM。所提出的滤光器的总厚度小于200nm,并且对于每个波长都是恒定的,这与例如图1中的不同。基于谐振腔的滤波器(例如Fabry-Perot)需要根据工作频率可变地堆叠几层,并且其通带特性完全通过更改光刻图案来控制。还将显示,获得窄带光学响应的​​关键在于纳米结构的介电环境,并且不必具有对称结构以确保顶部和底部界面之间SPP之间的良好耦合。此外,将提出一种分析周期性的分析方法,给出特定的结构和所需的工作波长,并证明其准确性。该方法方便地消除了对数字滤波器设计进行优化的需求,即通过运行具有不同周期性的多个耗时的仿真。 ©(2016)版权,光电仪器工程师协会(SPIE)。摘要的下载仅允许个人使用。

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